Calendar · Lecture Notes
MIT OpenCourseWare
Semiconductor Manufacturing
Art: Palmer, Edward, 1803-1872, Figures 113-123. Plate Electrical Machines, 1840 · Public domain
- Instructor
- Prof. Duane Boning
- Term
- Spring 2003
- Level
- Graduate
- What's inside
- 1 lecture note · 1 reading · 44 other files · 5 web pages
- Materials open
- MIT OCW
About this course
Source: MIT OpenCourseWare 6.780 Semiconductor Manufacturing, Spring 2003, Prof. Duane Boning — original course page on ocw.mit.edu ↗. License: CC BY-NC-SA 4.0. Study order: MIT's own listing order, section by section. Taken from MIT's published course files, downloaded from ocw.mit.edu on September 23, 2026. How RedLectern is built.
Materials are grouped the way MIT organized them. A verified, course-wide order has not been established here.
Has MIT solutions
Before you start
Prerequisites are not listed here. Check MIT's own syllabus for this course.
How this course was organized
What's here, and what isn't
- A lecture sequence of 21 items is confirmed. It stays as organized materials rather than a full course order.
Not included here
1 item from the source could not be safely included:
- MIT's page format for this item wasn't recognized clearly enough to place it safely.
Materials by section
Grouped by section, as MIT organized them. Not sequenced or ordered.
Lecture Notes
15 files
- Overview of Semiconductor Manufacturing Download
- Statistics Review: Distributions Download
- Statistics Review: Estimation Download
- Hypothesis Tests and Control Chart Introduction Download
- Advanced Control Charts, Nested Variance Download
- Analysis and Design of Experiments Download
- MANOVA, Factorial Experiments Quiz #1 Download
- Design of Experiments and Response Surface Modeling Download
- RSM and Regression Download
- Lecture 11 · Topics Download
- Sensors and Signals Download
- Run by Run Control Download
- Scheduling Quiz #2 Download
- Planning Download
- Factory Design and Efficiency Download
Assignments
8 files
Exams
Projects
9 files
- Analysis of Variation Sources in Ring Oscillator Layouts Thomas Chandler and Shion Hung · Reports Download
- Analysis of Variation Sources in Ring Oscillator Layouts Thomas Chandler and Shion Hung · Presentations Download
- Statistical Analysis of In-Situ End-Point Detection in Copper Chemical-Mechanical… · Reports Download
- Statistical Analysis of In-Situ End-Point Detection in Copper Chemical-Mechanical… · Presentations Download
- Epitaxial Silicon Deposition Data Analysis Roland Sargeant and Erik Smith · Reports Download
- Spatial Analysis of Ring Oscillator Devices Ajay Somani and Lee Wee Teo · Reports Download
- Spatial Analysis of Ring Oscillator Devices Ajay Somani and Lee Wee Teo · Presentations Download
- Determining Factors that Significantly Impact Injury Levels in a Production Facility Tee… · Reports Download
- Determining Factors that Significantly Impact Injury Levels in a Production Facility Tee… · Presentations Download
Other materials from this course
Course outline
Calendar · Lecture Notes
Lecture 2: Statistics Review: Distributions
Calendar · Lecture Notes
Lecture 3: Statistics Review: Estimation
Calendar · Lecture Notes
Lecture 4: Hypothesis Tests and Control Chart Introduction
Calendar · Lecture Notes
Lecture 5: Control Charts
Calendar · Lecture Notes
Lecture 6: Advanced Control Charts, Nested Variance
Calendar · Lecture Notes
Lecture 7: Analysis and Design of Experiments
Calendar · Lecture Notes
Lecture 8: ANOVA, Variance Component Estimation
Calendar · Lecture Notes
Lecture 9: MANOVA, Factorial Experiments Quiz #1
Calendar · Lecture Notes
Lecture 10: Design of Experiments and Response Surface Modeling
Calendar · Lecture Notes
Lecture 11: RSM and Regression
Calendar · Lecture Notes
Lecture 12: Yield Management and Modeling
Calendar · Lecture Notes
Lecture 13: Yield Modeling
Calendar · Lecture Notes
Lecture 14: Spatial Modeling
Calendar · Lecture Notes
Lecture 15: Sensors and Signals
Calendar · Lecture Notes
Lecture 16: PCA and Time Series
Calendar · Lecture Notes
Lecture 17: Run by Run Control
Calendar · Lecture Notes
Lecture 18: Real Time Control, Scheduling
Calendar · Lecture Notes
Lecture 19: Scheduling Quiz #2
Calendar · Lecture Notes
Lecture 20: Planning
Calendar · Lecture Notes
Lecture 21: Factory Design and Efficiency
MIT OpenCourseWare, Prof. Duane Boning, 6.780 Semiconductor Manufacturing, Spring 2003.
License: CC BY-NC-SA 4.0 · Edition: Spring 2003 · Open the original course on OCW ↗
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