Calendar · Lecture Notes
MIT OpenCourseWare
Design and Fabrication of Microelectromechanical Devices
Art: not stated, Fletcher's Combined Block Telegraph Apparatus and Bell, 1889 · Public domain
- Instructors
- Prof. Carol Livermore, Prof. Joel Voldman
- Term
- Spring 2007
- Level
- Graduate
- What's inside
- 1 lecture note · 1 reading · 48 other files · 4 web pages
- Materials open
- MIT OCW
About this course
Source: MIT OpenCourseWare 6.777J Design and Fabrication of Microelectromechanical Devices, Spring 2007, Prof. Carol Livermore, Prof. Joel Voldman — original course page on ocw.mit.edu ↗. License: CC BY-NC-SA 4.0. Study order: MIT's own listing order, section by section. Taken from MIT's published course files, downloaded from ocw.mit.edu on September 23, 2026. How RedLectern is built.
Materials are grouped the way MIT organized them. A verified, course-wide order has not been established here.
Has MIT solutions
Before you start
Prerequisites are not listed here. Check MIT's own syllabus for this course.
How this course was organized
What's here, and what isn't
- A lecture sequence of 25 items is confirmed. Assignment and exam materials exist too, but MIT's own order for them could not be verified, so they're shown as materials below rather than a sequence.
Not included here
6 items from the source could not be safely included:
- MIT's page format for this item wasn't recognized clearly enough to place it safely. (5 items)
- Referenced in a table, but without MIT's own verified order, so it isn't used to claim a sequence.
Materials by section
Grouped by section, as MIT organized them. Not sequenced or ordered.
Lecture Notes
28 files
- Introduction to MEMS; microfabrication for MEMS: part I (PDF 1) Download
- Introduction to MEMS; microfabrication for MEMS: part I (PDF 2) Download
- Microfabrication for MEMS: part II Download
- Microfabrication for MEMS: part III Download
- Microfabrication for MEMS: part IV; in-class fab problem Download
- Fabrication for the life sciences; material properties Download
- Elasticity Download
- Lecture slides on elements of circuit analysis (07lecture06e.pdf) Download
- Structures Download
- Lecture slides on elements of semiconductor physics, semiconductor diodes and resistors, the… (07lecture07e.pdf) Download
- Lumped-element modeling Download
- Energy-conserving transducers Download
- Dynamics, especially nonlinear Download
- Structures special topics Download
- Thermal energy domain; dissipation Download
- Modeling dissipative processes Download
- Fluids 1 Download
- Fluids 2 Download
- Mass transport in liquids Download
- Feedback Download
- Noise Download
- Packaging Download
- In-class design problem Download
- Design tradeoffs Download
- Power MEMS case study Download
- Optical MEMS case study Download
- Capacitive accelerometer case study Download
- BioMEMS case study Download
Assignments
18 files
- Problem set 1 Download
- Problem set 1 · Solutions Download
- Problem set 2 Download
- Problem set 2 · Solutions Download
- Treasure hunt Assignments Download
- Sample Download
- Worksheet Download
- Problem set 3 Download
- Problem set 3 · Solutions Download
- Problem set 4 Download
- Problem set 4 · Solutions Download
- Problem 6.10 Download
- Problem 6.11 Download
- Problem set 5 Download
- Problem set 6 Download
- Problem set 6 · Solutions Download
- Problem set 7 Download
- Problem set 7 · Solutions Download
Projects
Course outline
Calendar · Lecture Notes
Lecture 2: Microfabrication for MEMS: part II
Calendar · Lecture Notes
Lecture 3: Microfabrication for MEMS: part III
Calendar · Lecture Notes
Lecture 4: Microfabrication for MEMS: part IV; in-class fab problem
Calendar · Lecture Notes
Lecture 5: Fabrication for the life sciences; material properties
Calendar · Lecture Notes
Lecture 6: Elasticity or electronics I
Calendar · Lecture Notes
Lecture 7: Structures or electronics II
Calendar · Lecture Notes
Lecture 8: Lumped-element modeling
Calendar · Lecture Notes
Lecture 9: Energy-conserving transducers
Calendar · Lecture Notes
Lecture 10: Dynamics, especially nonlinear
Calendar · Lecture Notes
Lecture 11: Structures special topics
Calendar · Lecture Notes
Lecture 12: Thermal energy domain; dissipation
Calendar · Lecture Notes
Lecture 13: Modeling dissipative processes
Calendar · Lecture Notes
Lecture 14: Fluids 1
Calendar · Lecture Notes
Lecture 15: Fluids 2
Calendar · Lecture Notes
Lecture 16: Transport
Calendar · Lecture Notes
Lecture 17: Feedback
Calendar · Lecture Notes
Lecture 18: Noise
Calendar · Lecture Notes
Lecture 19: Packaging
Calendar · Lecture Notes
Lecture 20: In-class design problem
Calendar · Lecture Notes
Lecture 21: Design tradeoffs
Calendar · Lecture Notes
Lecture 22: Power MEMS case study
Calendar · Lecture Notes
Lecture 23: Optical MEMS case study
Calendar · Lecture Notes
Lecture 24: Capacitive accelerometer case study
Calendar · Lecture Notes
Lecture 25: BioMEMS case study
MIT OpenCourseWare, Prof. Carol Livermore, Prof. Joel Voldman, 6.777J Design and Fabrication of Microelectromechanical Devices, Spring 2007.
License: CC BY-NC-SA 4.0 · Edition: Spring 2007 · Open the original course on OCW ↗
Organized by RedLectern, independent of MIT and not endorsed by MIT.
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