Calendar · Lecture Notes
MIT OpenCourseWare
Micro/Nano Processing Technology
Art: Palmer, Edward, 1803-1872, Figures 113-123. Plate Electrical Machines, 1840 · Public domain
- Instructors
- Prof. Martin Schmidt, Susan Ruff, Dr. Robert O’Handley
- Term
- Fall 2005
- Level
- Undergraduate
- What's inside
- 1 lecture note · 1 reading · 48 other files · 5 web pages
- Materials open
- MIT OCW
About this course
Source: MIT OpenCourseWare 6.152J Micro/Nano Processing Technology, Fall 2005, Prof. Martin Schmidt, Susan Ruff, Dr. Robert O’Handley — original course page on ocw.mit.edu ↗. License: CC BY-NC-SA 4.0. Study order: MIT's own listing order, section by section. Taken from MIT's published course files, downloaded from ocw.mit.edu on September 23, 2026. How RedLectern is built.
Materials are grouped the way MIT organized them. A verified, course-wide order has not been established here.
Has MIT solutions
Before you start
Prerequisites are not listed here. Check MIT's own syllabus for this course.
How this course was organized
What's here, and what isn't
- A lecture sequence of 25 items is confirmed. Assignment and exam materials exist too, but MIT's own order for them could not be verified, so they're shown as materials below rather than a sequence.
Not included here
2 items from the source could not be safely included:
- MIT's page format for this item wasn't recognized clearly enough to place it safely.
- Referenced in a table, but without MIT's own verified order, so it isn't used to claim a sequence.
Materials by section
Grouped by section, as MIT organized them. Not sequenced or ordered.
Lecture Notes
18 files
- Overview/Safety/Lab Assignment CI-M: Introduction to CI-M Download
- IC Lab - Overview Download
- Diffusion Download
- IC Lab: Testing Download
- CI-M: Writing Technical Reports Download
- Diffusion/Implantation Download
- MEMS Lab: Overview Download
- Vacuum System Download
- CVD Download
- Sputtering Download
- CI-M: Feedback on IC Report, Reports Returned Download
- Evaporation Download
- MEMS Lab: Testing Download
- Etching (Wet) Download
- Etching (Dry) Download
- Fluids Lab: Testing Download
- Take Home Introduction / Patents Download
- Take Home Discussion Download
Labs
Assignments
16 problem sets
- Problem Set 1 Download
- Problem Set 1 · Solutions Download
- Problem Set 2 Download
- Problem Set 2 · Solutions Download
- Problem Set 3 Download
- Problem Set 3 · Solutions Download
- Problem Set 4 Download
- Problem Set 4 · Solutions Download
- Problem Set 5 Download
- Problem Set 5 · Solutions Download
- Problem Set 6 Download
- Problem Set 6 · Solutions Download
- Problem Set 7 Download
- Problem Set 7 · Solutions Download
- Problem Set 8 Download
- Problem Set 8 · Solutions Download
Exams
- Quiz 1 Solution Download
- Supporting Materials for Quiz 1 - Equations and Figures Download
- Fall 2004 Quiz 2 Solutions Download
- Spring 2005 Quiz 2 Download
- Spring 2005 Problem Set 7 Download
- Take Home Exam Download
Other materials from this course
Course outline
Calendar · Lecture Notes
Lecture 2: IC Lab - Overview (MAS)
Calendar · Lecture Notes
Lecture 3: Oxidation (MAS)
Calendar · Lecture Notes
Lecture 4: Diffusion (RCOH)
Calendar · Lecture Notes
Lecture 5: IC Lab: Testing (MAS) CIM: Writing Technical Reports (SR)
Calendar · Lecture Notes
Lecture 6: Diffusion/Implantation (RCOH)
Calendar · Lecture Notes
Lecture 7: MEMS Lab: Overview (MAS)
Calendar · Lecture Notes
Lecture 8: Vacuum System (RCOH)
Calendar · Lecture Notes
Lecture 9: CVD (RCOH)
Calendar · Lecture Notes
Lecture 10: Sputtering (RCOH) CIM: Feedback on IC Report, Reports Returned (SR)
Calendar · Lecture Notes
Lecture 11: Fluids Lab: Overview (MAS)
Calendar · Lecture Notes
Lecture 12: Evaporation (RCOH)
Calendar · Lecture Notes
Lecture 13: MEMS Lab: Testing (MAS)
Calendar · Lecture Notes
Lecture 14: Lithography (MAS)
Calendar · Lecture Notes
Lecture 15: Lithography, Soft Lithography (MAS)
Calendar · Lecture Notes
Lecture 16: Etching (Wet) (RCOH)
Calendar · Lecture Notes
Lecture 17: Etching (Dry) (RCOH)
Calendar · Lecture Notes
Lecture 18: CMOS (MAS)
Calendar · Lecture Notes
Lecture 19: Advanced Silicon Devices (MAS)
Calendar · Lecture Notes
Lecture 20: Fluids Lab: Testing (MAS)
Calendar · Lecture Notes
Lecture 21: Take Home Introduction / Patents (MAS)
Calendar · Lecture Notes
Lecture 22: Take Home Discussion (MAS)
Calendar · Lecture Notes
Lecture 23: Advanced Topics (Guest)
Calendar · Lecture Notes
Lecture 24: Advanced Topics (cont.) (Guest)
Calendar · Lecture Notes
Lecture 25: Analog Devices Fab Tour
MIT OpenCourseWare, Prof. Martin Schmidt, Susan Ruff, Dr. Robert O’Handley, 6.152J Micro/Nano Processing Technology, Fall 2005.
License: CC BY-NC-SA 4.0 · Edition: Fall 2005 · Open the original course on OCW ↗
Organized by RedLectern, independent of MIT and not endorsed by MIT.
Per-resource rights are recorded on each resource; All-Rights-Reserved items are link-only, never mirrored.
